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GADGETS & HARDWARE

🇷🇺 Zelenograd Mikron to Receive First Serial Russian Lithography Tool

Alex Carter
Alex Carter
Sep 12, 2026•3 min read
🇷🇺 Zelenograd Mikron to Receive First Serial Russian Lithography Tool

Key Facts

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Technical Specifications

: up to 350 nm (130 nm planned)

: 200 mm (8 inches)

: 365 nm (i-line mercury arc / UV)

: up to 40 wafers per hour